CITATION.cff

cff-version: 1.2.0
message: "If you use this work, please cite it as below."
title: >-
  Open-Source TCAD for the SkyWater Sky130 Process, Calibrated Against
  Measured Silicon from 300 K down to 77 K
authors:
  - family-names: Alanampa
    given-names: Joonatan
date-released: "2026-07-20"
version: "1.0"
repository-code: "https://github.com/JoonatanAlanampa/devphys"
license: Apache-2.0
keywords:
  - TCAD
  - semiconductor device physics
  - SkyWater Sky130
  - DEVSIM
  - drift-diffusion
  - cryogenic CMOS
  - 77 K
  - dopant freeze-out
  - subthreshold swing saturation
  - compact modeling
  - OpenVAF
  - ngspice
abstract: >-
  A fully open-source TCAD workflow for the SkyWater Sky130 130 nm process,
  calibrated against three measured-silicon datasets: Google/SkyWater wafer
  characterization at 300 K (long-channel and minimum-length 0.15 um
  devices) and the UTA/Fermilab 77 K liquid-nitrogen dataset. Includes a
  verified from-scratch drift-diffusion solver, 2D DEVSIM device models with
  field-dependent mobility, velocity saturation and dopant freeze-out
  (incomplete ionization), extraction of undisclosed effective process
  parameters (channel and halo doping, surface mobility law, saturation
  velocity, 77 K mobility ratio), quantification of the cryogenic
  subthreshold-swing saturation anomaly (measured 71 mV/dec vs ideal-physics
  23 mV/dec), and a compact-model export via Verilog-A/OpenVAF/OSDI running
  in ngspice.